Quality standard:
| Molecular formula: WF6 Molecular weight: 297.8 | |
| Item | Index | 
| tungsten hexafluoride (WF6) ≥ | 99.999 | 
| nitrogen gas (N2) /ppmv < | 1 | 
| oxygen+argon (O2+Ar) /ppmv < | 0.5 | 
| carbon monoxide (CO) /ppmv< | 0.5 | 
| carbon dioxide (CO2) /ppmv< | 0.5 | 
| carbon tetrafluoride (CF4) /ppmv< | 0.5 | 
| nitrogen trifluoride (NF3) /ppmv < | 0.5 | 
| sulfur hexafluoride (SF6) /ppmv< | 0.5 | 
| silicon fluoride (SiF4) /ppmv < | 0.5 | 
| ydrofluoric acid (HF) /ppmv< | 5 | 
| alumnium (Al) /ppmv < | 0.2 | 
| calcium (Ca) /ppmv< | 0.01 | 
| carbon monoxide (CO) /ppmv< | 0.01 | 
| chromium (Cr) /ppmv < | 0.02 | 
| copper (Cu) /ppmv < | 0.01 | 
| iron (Fe) /ppmv < | 0.02 | 
| potassium (K) /ppmv< | 0.15 | 
| magnesium (Mg) /ppmv< | 0.01 | 
| manganese (Mn) /ppmv< | 0.1 | 
| molybdenum (Mo) /ppmv< | 0.5 | 
| sodium (Na) /ppmv < | 0.015 | 
| nickel (Ni) /ppmv< | 0.1 | 
| lead (Pb) /ppmv < | 0.02 | 
| thorium (Th) /ppmv< | 0.1 | 
| uranium (U) /ppmv < | 0.05 | 
| zinc (Zn) /ppmv < | 0.05 | 
Character:  
Colorless gas or light yellow liquid or solid; melting point: 2.3℃; boling point: 17.5℃
To use:  
As chemical evaporation of tungsten; as fluorinating agent
Storage:  
Should be preserved in cool, dry and ventilated warehouse; separate with fire and heat source; in sealed container; separate with metal powder
Storage:  
steel gas cylinder
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